Yuki UOHASHI/Koichi SUZUMORI/Hironari TANIGUCHI
The Journal of Mechanical Science and Technology, vol. 24, no. 1, pp.219-222, 2010

Abstract : In recent years, research and development on micro fluid systems has become active in the fields of chemical technology and biotechnology. For the realization of these micro fluid systems, micro fluid devices such as micro-valves and micro pumps are very important. This paper reports the fabrication and experimental evaluation of several micro one-way valves. The valves are fabricated through a micro molding process, which makes the fabrication process simple and suitable for mass production. The experimental results indicate that the developed valve has great performance with a normal flow rate of 130.2 ml/min and a leak flow of 2.2 ml/min. The normal flow rate is 1.4 times higher than that of the previous model.

Keyword : MEMS; Micro fluid device; Micro rubber molding; One-way valve